Snms abbr. secondary neutrals mass spectrometer 次級中性粒子質譜儀; secondary neutrals mass spectroscopy 次級中性粒子質譜分析技術; sputtered neutrals mass spectrometry 濺射中性粒子質譜測定技術; sputtered neutrals mass spectroscopy 濺射中性粒子質譜分析技術